Invention Grant
- Patent Title: Optical semiconductor device, method for manufacturing optical semiconductor device, and method for manufacturing optical module
- Patent Title (中): 光半导体装置，光半导体装置的制造方法以及光模块的制造方法
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Application No.: US14300269Application Date: 2014-06-10
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Publication No.: US09263853B2Publication Date: 2016-02-16
- Inventor: Yusuke Azuma , Eitaro Ishimura , Kimitaka Shibata
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2013-215482 20131016
- Main IPC: H01S5/16
- IPC: H01S5/16 ; G01B11/02 ; G01B11/14 ; H01S5/02
Abstract:
An optical semiconductor device includes: a resonator end face; an optical waveguide; a window structure located between the resonator end face and the optical waveguide; and a vernier on the window structure and allowing measurement of length of the window structure along an optical axis direction.
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