Invention Grant
US09264815B2 Silicon condenser microphone 有权
硅电容麦克风

Silicon condenser microphone
Abstract:
A silicon condenser microphone is disclosed. The silicon condenser microphone includes a substrate having a top surface, a lower surface opposed to the top surface, and a recess concave from the top surface toward the lower surface. The recess includes a bottom for carrying a chip thereon. The microphone further includes a transducer spanning the recess. By virtue of this configuration, the size of the microphone is reduced, and acoustic performance of the microphone is accordingly improved.
Public/Granted literature
Information query
Patent Agency Ranking
0/0