Invention Grant
- Patent Title: Filament lamp for heating
- Patent Title (中): 灯丝灯加热
-
Application No.: US13952153Application Date: 2013-07-26
-
Publication No.: US09265091B2Publication Date: 2016-02-16
- Inventor: Yukio Ueshima
- Applicant: USHIO DENKI KABUSHIKI KAISHA
- Applicant Address: JP Chiyoda-Ku, Tokyo
- Assignee: USHIO DENKI KABUSHIKI KAISHA
- Current Assignee: USHIO DENKI KABUSHIKI KAISHA
- Current Assignee Address: JP Chiyoda-Ku, Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2012-219303 20121001
- Main IPC: H05B3/10
- IPC: H05B3/10 ; H05B3/00 ; H01L21/67

Abstract:
Disclosed herein are a filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp rotates relative to the workpiece and radiates light thereonto. Further, the present invention provides a structure that enables the filament lamps to uniformly heat the workpiece even with respect to the radial direction of the workpiece. For this, the filament lamp includes an arc-shaped emitting part which extends in a circumferential direction of the relative rotation, and an auxiliary emitting part which is disposed inside a circle extending along the arc-shaped emitting part and extends from the arc-shaped emitting part in a direction crossing the circle. In addition, the present invention is configured such that areas of the workpiece that correspond to spaces between the arc-shaped emitting parts of the adjacent filament lamps pass just below the corresponding auxiliary emitting parts.
Public/Granted literature
- US20140091079A1 FILAMENT LAMP FOR HEATING Public/Granted day:2014-04-03
Information query