Invention Grant
- Patent Title: Precision continuous stamp casting method for roll-based soft lithography
- Patent Title (中): 用于辊式软光刻的精密连续压铸方法
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Application No.: US13709182Application Date: 2012-12-10
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Publication No.: US09266260B2Publication Date: 2016-02-23
- Inventor: Joseph Edward Petrzelka
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: MIT Technology Licensing Office
- Agent Sam Pasternack
- Main IPC: B29C41/00
- IPC: B29C41/00 ; B29C41/04 ; B29C41/22 ; G03F7/00 ; B82Y10/00 ; B82Y40/00 ; B29K83/00

Abstract:
Method for casting a continuous cylindrical polymer stamp. The method includes depositing a first layer of a fluid polymer on the inside of a rotatable drum and rotating the drum for a selected time and at a selected angular velocity. The polymer is cured to produce a uniform datum surface. A second layer of polymer is deposited on the first layer in the drum and the drum is rotated until solvent in the polymer has evaporated thereby forming a stable layer. The polymer is selectively exposed and developed to create a desired pattern. Thereafter, a polymer precursor is deposited on the patterned second layer and the polymer precursor is allowed to cure while the drum is rotating to produce a cured stamp. The cured stamp is removed from the drum.
Public/Granted literature
- US20130154152A1 Precision Continuous Stamp Casting Method for Roll-Based Soft Lithography Public/Granted day:2013-06-20
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