Invention Grant
- Patent Title: Piezoelectric actuator and method of making a piezoelectric actuator
- Patent Title (中): 压电致动器和制造压电致动器的方法
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Application No.: US14397333Application Date: 2012-07-25
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Publication No.: US09266326B2Publication Date: 2016-02-23
- Inventor: James Elmer Abbott, Jr. , Chien-Hua Chen , Jeffrey R. Pollard
- Applicant: James Elmer Abbott, Jr. , Chien-Hua Chen , Jeffrey R. Pollard
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- Agency: Hewlett-Packard Patent Department
- International Application: PCT/US2012/048058 WO 20120725
- International Announcement: WO2014/018028 WO 20140130
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/145 ; H01L41/053 ; H01L41/22 ; B41J2/16
Abstract:
In one example, a piezoelectric actuator includes a piezoelectric material, a first conductor on a first part of the piezoelectric material, and a membrane bonded to the first conductor with an adhesive. The first conductor has a root mean square surface roughness of at least 10 nm at the bonding interface with the membrane.
Public/Granted literature
- US20150138276A1 PIEZOELECTRIC ACTUATOR AND METHOD OF MAKING A PIEZOELECTRIC ACTUATOR Public/Granted day:2015-05-21
Information query
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