Invention Grant
- Patent Title: Method for supplying sequential power impulses
- Patent Title (中): 提供顺序电源脉冲的方法
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Application No.: US14112757Application Date: 2012-04-04
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Publication No.: US09267200B2Publication Date: 2016-02-23
- Inventor: Siegfried Krassnitzer , Daniel Lendi , Markus Lechthaler , Kurt Ruhm
- Applicant: Siegfried Krassnitzer , Daniel Lendi , Markus Lechthaler , Kurt Ruhm
- Applicant Address: CH Trubbach
- Assignee: OERLIKON SURFACE SOLUTIONS AG, TRUBBACH
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, TRUBBACH
- Current Assignee Address: CH Trubbach
- Agency: Pearne & Gordon LLP
- Priority: DE102011018363 20110420; DE102011117177 20111028
- International Application: PCT/EP2012/001484 WO 20120404
- International Announcement: WO2012/143091 WO 20121026
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C23C14/35
Abstract:
The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.
Public/Granted literature
- US20140190819A1 METHOD FOR SUPPLYING SEQUENTIAL POWER IMPULSES Public/Granted day:2014-07-10
Information query
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