Invention Grant
- Patent Title: Gas-lift pumps for flowing and purifying molten silicon
- Patent Title (中): 用于流动和净化熔融硅的气举泵
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Application No.: US13039789Application Date: 2011-03-03
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Publication No.: US09267219B2Publication Date: 2016-02-23
- Inventor: Peter L. Kellerman , Frederick Carlson
- Applicant: Peter L. Kellerman , Frederick Carlson
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B15/06
- IPC: C30B15/06 ; C30B11/00 ; C30B29/06 ; C03B29/08

Abstract:
The embodiments herein relate to a sheet production apparatus. A vessel is configured to hold a melt of a material and a cooling plate is disposed proximate the melt. This cooling plate configured to form a sheet of the material on the melt. A pump is used. In one instance, this pump includes a gas source and a conduit in fluid communication with the gas source. In another instance, this pump injects a gas into a melt. The gas can raise the melt or provide momentum to the melt.
Public/Granted literature
- US20110271897A1 GAS-LIFT PUMPS FOR FLOWING AND PURIFYING MOLTEN SILICON Public/Granted day:2011-11-10
Information query
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