Invention Grant
- Patent Title: Differential pressure sensor
- Patent Title (中): 差压传感器
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Application No.: US14091770Application Date: 2013-11-27
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Publication No.: US09267858B2Publication Date: 2016-02-23
- Inventor: Tatsuo Tanaka , Yoshiyuki Ishikura
- Applicant: Azbil Corporation
- Applicant Address: JP Tokyo
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Troutman Sanders LLP
- Priority: JP2012-260919 20121129
- Main IPC: G01L13/02
- IPC: G01L13/02

Abstract:
A differential pressure sensor includes a sensor chip provided with a sensor diaphragm, a first retaining member bonded facing a peripheral edge portion of one face of the sensor diaphragm and having a first pressure guiding hole guiding a first fluid pressure to the one face of the sensor diaphragm, and a second retaining member bonded facing a peripheral edge portion of the other face of the sensor diaphragm and having a second pressure guiding hole guiding a second fluid pressure to the other face of the sensor diaphragm. The differential pressure sensor also includes a sensor housing having a sensor chamber containing the sensor chip, a first pressure guiding duct guiding the first fluid pressure to a first inner wall face of the sensor chamber, and a second pressure guiding duct guiding the second fluid pressure to a second inner wall face of the sensor chamber.
Public/Granted literature
- US20140144243A1 DIFFERENTIAL PRESSURE SENSOR Public/Granted day:2014-05-29
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