Invention Grant
US09267882B2 Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same
有权
用于检测有机化合物的装置和使用其的显示装置的制造装置
- Patent Title: Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same
- Patent Title (中): 用于检测有机化合物的装置和使用其的显示装置的制造装置
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Application No.: US14226543Application Date: 2014-03-26
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Publication No.: US09267882B2Publication Date: 2016-02-23
- Inventor: Eun-Ju Song , Hun-Jung Yi
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0033061 20130327
- Main IPC: F26B3/20
- IPC: F26B3/20 ; G01N21/3504

Abstract:
An apparatus for detecting an organic compound and an apparatus for manufacturing a display device, the apparatus for detecting an organic compound including an infrared light emitting unit that irradiates infrared rays toward a gas-phase organic compound used as a process gas in an atmospheric pressure equipment; a first window that separates the organic compound from the infrared light emitting unit; an infrared detection unit that measures an infrared absorbance of the organic compound; and a second window that separates the organic compound from the infrared detection unit, wherein infrared absorption regions of the first window and the second window are different from an infrared absorption region of the organic compound.
Public/Granted literature
- US20140290089A1 APPARATUS FOR DETECTING ORGANIC COMPOUNDS AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE USING THE SAME Public/Granted day:2014-10-02
Information query
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