Invention Grant
- Patent Title: Observation and analysis unit
- Patent Title (中): 观察和分析单位
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Application No.: US13395636Application Date: 2010-08-20
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Publication No.: US09268126B2Publication Date: 2016-02-23
- Inventor: Martin Edelmann , Christian Thomas
- Applicant: Martin Edelmann , Christian Thomas
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Patterson Thuente Pedersen, P.A.
- Priority: DE102009041993 20090918
- International Application: PCT/EP2010/062169 WO 20100820
- International Announcement: WO2011/032802 WO 20110324
- Main IPC: G02B21/36
- IPC: G02B21/36 ; H01J37/22 ; G01N23/225 ; H01J37/16

Abstract:
An observation and analysis unit that magnifies an image of a sample and further accomplishes the evaluation and analysis thereof. The observation and analysis unit includes a light-microscopic device designed for the magnified imaging and optical evaluation of the sample and a sample analyzer that analyzes selected regions of the sample. The sample analyzer includes an electron source from which an electron beam can be directed to a region of the sample selected by use of the light-microscopic device. The sample analyzer further includes an X-ray detector designed to detect X-ray radiation generated by the interaction of the electron beam with the sample material. The unit further includes an actuation and evaluation unit that generates control commands for the light-microscopic device and the electron source and spectrally analyzes the X-ray radiation.
Public/Granted literature
- US20120168623A1 OBSERVATION AND ANALYSIS UNIT Public/Granted day:2012-07-05
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