Invention Grant
US09268129B2 Driving calibration apparatus of electrostatic MEMS scanning mirror and driving calibration method thereof 有权
驱动静电​​MEMS扫描镜的校准装置及其驱动校准方法

Driving calibration apparatus of electrostatic MEMS scanning mirror and driving calibration method thereof
Abstract:
The invention provides a driving calibration apparatus of an electrostatic MEMS scanning mirror and a driving calibration method thereof The driving calibration method includes the following steps. Different reference voltages are sequentially set to drive a plane mirror of the electrostatic MEMS scanning mirror to swing. Projection positions on a projected surface corresponding to the reference voltages that the laser beam projects to are determined. A driving lookup table is established according to the reference voltages and the corresponding projection positions. Calibrated driving voltages corresponding to ideal projection positions are determined according to the driving lookup table. The pane mirror is driven to swing according to the calibrated driving voltages.
Information query
Patent Agency Ranking
0/0