Invention Grant
US09268129B2 Driving calibration apparatus of electrostatic MEMS scanning mirror and driving calibration method thereof
有权
驱动静电MEMS扫描镜的校准装置及其驱动校准方法
- Patent Title: Driving calibration apparatus of electrostatic MEMS scanning mirror and driving calibration method thereof
- Patent Title (中): 驱动静电MEMS扫描镜的校准装置及其驱动校准方法
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Application No.: US14215088Application Date: 2014-03-17
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Publication No.: US09268129B2Publication Date: 2016-02-23
- Inventor: Chia-Hao Hsu , Yu-Nan Tsai
- Applicant: LITE-ON IT CORPORATION
- Applicant Address: TW Taipei
- Assignee: Lite-On Technology Corporation
- Current Assignee: Lite-On Technology Corporation
- Current Assignee Address: TW Taipei
- Agency: Jianq Chyun IP Office
- Priority: CN201310747059 20131227
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10

Abstract:
The invention provides a driving calibration apparatus of an electrostatic MEMS scanning mirror and a driving calibration method thereof The driving calibration method includes the following steps. Different reference voltages are sequentially set to drive a plane mirror of the electrostatic MEMS scanning mirror to swing. Projection positions on a projected surface corresponding to the reference voltages that the laser beam projects to are determined. A driving lookup table is established according to the reference voltages and the corresponding projection positions. Calibrated driving voltages corresponding to ideal projection positions are determined according to the driving lookup table. The pane mirror is driven to swing according to the calibrated driving voltages.
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