Invention Grant
- Patent Title: Exposure apparatus, exposure method, and device fabrication method
- Patent Title (中): 曝光装置,曝光方法和装置制造方法
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Application No.: US14178391Application Date: 2014-02-12
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Publication No.: US09268240B2Publication Date: 2016-02-23
- Inventor: Takanori Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-033869 20130222
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The present invention provides an exposure apparatus which transfers a pattern of a mask to a substrate, including a measurement unit configured to measure, at a first measurement point and a second measurement point, a height of a measurement target portion in a shot region of the substrate held by a stage, and a control unit configured to move the stage in a direction of height of the substrate based on a correction result of correcting, by a set correction value, a measured height of the measurement target portion at the first measurement point in a acceleration period of the stage, and when a measured height of the measurement target portion at the second measurement point in the constant speed period of the stage deviates from an allowable range, obtain a new correction value instead of the set correction value.
Public/Granted literature
- US20140240687A1 EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD Public/Granted day:2014-08-28
Information query
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