Invention Grant
- Patent Title: FinFET device and method of manufacturing same
- Patent Title (中): FinFET器件及其制造方法
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Application No.: US14243336Application Date: 2014-04-02
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Publication No.: US09269632B2Publication Date: 2016-02-23
- Inventor: Chi-Wen Liu , Chao-Hsiung Wang
- Applicant: Taiwan Semiconductor Manufacturing Company Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8238 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure disposed over the substrate. The fin structure includes one or more fins. The semiconductor device further includes an insulation material disposed on the substrate. The semiconductor device further includes a gate structure disposed on a portion of the fin structure and on a portion of the insulation material. The gate structure traverses each fin of the fin structure. The semiconductor device further includes a source and drain feature formed from a material having a continuous and uninterrupted surface area. The source and drain feature includes a surface in a plane that is in direct contact with a surface in a parallel plane of the insulation material, each of the one or more fins of the fin structure, and the gate structure.
Public/Granted literature
- US20140206156A1 FINFET DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2014-07-24
Information query
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