Invention Grant
- Patent Title: EEPROM device and forming method and erasing method thereof
- Patent Title (中): EEPROM器件及其形成方法及其擦除方法
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Application No.: US14587472Application Date: 2014-12-31
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Publication No.: US09269717B2Publication Date: 2016-02-23
- Inventor: Tao Yu
- Applicant: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Current Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Current Assignee Address: CN Shanghai
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410081177 20140306
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/788 ; H01L27/115 ; G11C16/14 ; H01L29/66 ; G11C16/04

Abstract:
An EEPROM device, a forming method thereof, and a method for implementing an erase operation to the device are provided. The EEPROM device includes: a semiconductor substrate having active regions therein; a word line disposed on a first active region; float gate dielectric layers disposed on second active regions; float gates disposed on the float gate dielectric layers, wherein each of the float gates has a width larger than that of the second active region; control gates disposed on control gate dielectric layers which are disposed on the float gates; an isolation oxide layer disposed between the word line and the float gates along with the control gates; and bit line doping regions disposed on third active regions. Accordingly, an erase operation can be implemented from a bit line, and coupling ratios of a float gate to a control gate and to a bit line doping region can be improved.
Public/Granted literature
- US20150255476A1 EEPROM DEVICE AND FORMING METHOD AND ERASING METHOD THEREOF Public/Granted day:2015-09-10
Information query
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