Invention Grant
US09269761B2 Metal-insulator-metal capacitor 有权
金属绝缘体金属电容器

Metal-insulator-metal capacitor
Abstract:
An embodiment metal-insulator-metal (MiM) capacitor includes a gate stack disposed upon an insulation layer, the gate stack including a gate metal, the gate metal serving as a bottom electrode, a dielectric layer disposed upon the gate stack, and a top metal layer disposed upon the dielectric layer, the top metal serving as a top electrode.
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