Invention Grant
- Patent Title: Metal-insulator-metal capacitor
- Patent Title (中): 金属绝缘体金属电容器
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Application No.: US13791195Application Date: 2013-03-08
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Publication No.: US09269761B2Publication Date: 2016-02-23
- Inventor: Yu-Hong Pan , Jen-Pan Wang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L49/02
- IPC: H01L49/02

Abstract:
An embodiment metal-insulator-metal (MiM) capacitor includes a gate stack disposed upon an insulation layer, the gate stack including a gate metal, the gate metal serving as a bottom electrode, a dielectric layer disposed upon the gate stack, and a top metal layer disposed upon the dielectric layer, the top metal serving as a top electrode.
Public/Granted literature
- US20140252549A1 Metal-Insulator-Metal Capacitor Public/Granted day:2014-09-11
Information query
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