Invention Grant
US09269884B2 Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device
有权
超声波换能器,超声波探头和超声波检测装置
- Patent Title: Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device
- Patent Title (中): 超声波换能器,超声波探头和超声波检测装置
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Application No.: US13896700Application Date: 2013-05-17
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Publication No.: US09269884B2Publication Date: 2016-02-23
- Inventor: Tomoaki Nakamura , Hironori Suzuki , Jiro Tsuruno
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2012-115320 20120521
- Main IPC: B06B1/06
- IPC: B06B1/06 ; H01L41/08 ; G01S15/02

Abstract:
An ultrasonic transducer includes a substrate, a supporting film, and a piezoelectric element. The substrate includes an opening. The supporting film is configured on the substrate to cover the opening. The piezoelectric element is configured at a part of the supporting film. The part overlaps with the opening in a planar view in a thickness direction of the substrate. A thickness of the part of at a center of gravity in the planar view is smaller than a thickness of an outer edge portion of the part. The outer edge portion is closer to the substrate than the center to the substrate.
Public/Granted literature
- US20130308425A1 ULTRASONIC TRANSDUCER, ULTRASONIC PROBE, AND ULTRASONIC EXAMINATION DEVICE Public/Granted day:2013-11-21
Information query
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