Invention Grant
- Patent Title: Carrier head with shims
- Patent Title (中): 带垫片的承载头
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Application No.: US13445316Application Date: 2012-04-12
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Publication No.: US09272387B2Publication Date: 2016-03-01
- Inventor: Stacy Meyer , Young J. Paik , Christopher R. Mahon
- Applicant: Stacy Meyer , Young J. Paik , Christopher R. Mahon
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/32
- IPC: B24B37/32
Abstract:
A carrier head includes a base, a substrate mounting surface, a retaining ring secured to the base, and a plurality of stacked shims located between the base and the retaining ring. The retaining ring has a bottom surface for contacting a polishing pad during polishing.
Public/Granted literature
- US20120264360A1 Carrier Head With Shims Public/Granted day:2012-10-18
Information query
