Invention Grant
- Patent Title: Polishing apparatus and polishing method
- Patent Title (中): 抛光设备和抛光方法
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Application No.: US14527714Application Date: 2014-10-29
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Publication No.: US09272389B2Publication Date: 2016-03-01
- Inventor: Taro Takahashi , Yuta Suzuki
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2013-228240 20131101
- Main IPC: B24B49/00
- IPC: B24B49/00 ; B24B37/04 ; B24B1/00 ; H01L21/66 ; H01L21/306 ; B24B49/10 ; B24B37/013 ; B24B37/005 ; H01L21/67 ; H01L21/12

Abstract:
A polishing apparatus capable of monitoring an accurate progress of polishing is disclosed. The polishing apparatus includes: a polishing table for supporting a polishing pad; a table motor configured to rotate the polishing table; a top ring configured to press a substrate against the polishing pad to polish the substrate; a dresser configured to dress the polishing pad while oscillating on the polishing pad during polishing of the substrate; a filtering device configured to remove a vibration component, having a frequency corresponding to an oscillation period of the dresser, from an output current signal of the table motor; and a polishing monitoring device configured to monitor a progress of polishing of the substrate based on the output current signal from which the vibration component has been removed.
Public/Granted literature
- US20150125971A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2015-05-07
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