Invention Grant
- Patent Title: Device for detaching a product substrate off a carrier substrate
- Patent Title (中): 用于将产品基板从载体基板上分离的装置
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Application No.: US13641479Application Date: 2011-03-29
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Publication No.: US09272501B2Publication Date: 2016-03-01
- Inventor: Jürgen Burggraf , Friedrich Paul Lindner
- Applicant: Jürgen Burggraf , Friedrich Paul Lindner
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group GmbH
- Current Assignee: EV Group GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Priority: EP10004313 20100423
- International Application: PCT/EP2011/001556 WO 20110329
- International Announcement: WO2011/131283 WO 20111027
- Main IPC: B32B38/10
- IPC: B32B38/10 ; H01L21/67 ; B32B37/00 ; B32B38/00

Abstract:
Device for stripping a product substrate off a carrier substrate connected to the product substrate by an bonding layer by means of a film frame, a flexible film which is connected to the film frame and which has an adhesive layer for holding the product substrate in a contacting surface section of the film, the film being connected to the film frame in an attachment section of the film which surrounds the contacting surface section, as well as a solvent reservoir formed by the film frame and the film, especially of variable volume, for holding the solvent for detaching the bonding layer, and the product substrate and the bonding layer can be accommodated in the solvent reservoir, and by delivery means for delivering the solvent into the solvent reservoir and by stripping means for stripping the product substrate off the carrier substrate.
Public/Granted literature
- US20130025796A1 DEVICE AND METHOD FOR DETACHING A PRODUCT SUBSTRATE OFF A CARRIER SUBSTRATE Public/Granted day:2013-01-31
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