Invention Grant
US09272515B2 Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, ultrasonic transducer, and ultrasonic device 有权
液体喷射头,液体喷射装置,压电元件,超声波换能器和超声波装置

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, ultrasonic transducer, and ultrasonic device
Abstract:
A liquid ejecting head includes a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid and includes a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and second electrode disposed on the piezoelectric layer. The diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method.
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