Invention Grant
US09272515B2 Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, ultrasonic transducer, and ultrasonic device
有权
液体喷射头,液体喷射装置,压电元件,超声波换能器和超声波装置
- Patent Title: Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, ultrasonic transducer, and ultrasonic device
- Patent Title (中): 液体喷射头,液体喷射装置,压电元件,超声波换能器和超声波装置
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Application No.: US14173883Application Date: 2014-02-06
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Publication No.: US09272515B2Publication Date: 2016-03-01
- Inventor: Koji Ohashi , Shiro Yazaki , Eiju Hirai
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2013-051086 20130313
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; H01L41/08 ; H01L41/09 ; B41J2/055 ; B41J2/16

Abstract:
A liquid ejecting head includes a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid and includes a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and second electrode disposed on the piezoelectric layer. The diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method.
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