Invention Grant
US09272916B2 Non-spherical silica sol, process for producing the same, and composition for polishing 有权
非球形硅溶胶,其制造方法和抛光用组合物

Non-spherical silica sol, process for producing the same, and composition for polishing
Abstract:
Provided is a non-spherical silica sol containing non-spherical silica fine particles dispersed in a dispersion medium, the non-spherical silica fine particles having an average particle diameter in a range of 3 to 150 nm as measured by dynamic light scattering, a minor-diameter/major-diameter ratio in a range of 0.01 to 0.8, and a specific surface area in a range of 10 to 800 m2/g, and also having a plurality of wart-like projections on the surfaces thereof, and a process for producing the non-spherical silica sol. The non-spherical silica fine particles contained in the non-spherical silica sol have a unique structure different from the structure of ordinary non-spherical silica fine particles.
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