Invention Grant
- Patent Title: Method for inspecting liquid droplet ejection apparatus
- Patent Title (中): 检测液滴喷射装置的方法
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Application No.: US14624800Application Date: 2015-02-18
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Publication No.: US09273397B2Publication Date: 2016-03-01
- Inventor: Masashi Goto , Takayuki Miyoshi , Masahiro Muro
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Panasonic Patent Center
- Priority: JP2014-047617 20140311
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/52 ; C23C18/00

Abstract:
A method for inspecting a liquid droplet ejection apparatus that ejects a liquid droplet from an ejection port includes (a) ejecting the liquid droplet toward an ejection target at an inspection drive frequency that is higher than an operation drive frequency set during a normal operation; (b) measuring a characteristic of the liquid droplet deposited on a surface of the ejection target; and (c) determining that the ejection port the characteristic of which is outside a predetermined range is defective.
Public/Granted literature
- US20150259784A1 METHOD FOR INSPECTING LIQUID DROPLET EJECTION APPARATUS AND METHOD FOR MANUFACTURING DEVICE Public/Granted day:2015-09-17
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