Invention Grant
- Patent Title: Additive for electrodeposition
- Patent Title (中): 电沉积添加剂
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Application No.: US14215092Application Date: 2014-03-17
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Publication No.: US09273407B2Publication Date: 2016-03-01
- Inventor: Jiye Luo , Yaofeng Sun , Shu Kin Yau
- Applicant: Hong Kong Applied Science and Technology Research Institute Co. Ltd.
- Applicant Address: CN Hong Kong
- Assignee: Hong Kong Applied Science and Technology Research Institute Company Limited
- Current Assignee: Hong Kong Applied Science and Technology Research Institute Company Limited
- Current Assignee Address: CN Hong Kong
- Agency: Eagle IP Limited
- Agent Jacqueline C. Lui
- Main IPC: C07C217/28
- IPC: C07C217/28 ; C25D3/38 ; C07D207/06 ; C07D211/14

Abstract:
This invention relates to a new compound represented by formula (I). Particularly, the new compound is used as an additive in copper electroplating. A chemical structure for the leveler, an electroplating bath containing the same, a method of preparing the additive and a method of electroplating a substrate with the electroplating bath containing the additive are disclosed. The additive compound/molecule of the present invention provides a branched structure at each ends, wherein each of the branches comprises a positively charged nitrogen moiety. The additive compound/molecule is formed by linking the branches having the positive charged nitrogen moieties to the backbone of the additive compound/molecule. This leads to a high charge density novel additive compound/molecule.
Public/Granted literature
- US20150259814A1 Additive for Electrodeposition Public/Granted day:2015-09-17
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