Invention Grant
US09273408B2 Direct injection molded solder process for forming solder bumps on wafers
有权
用于在晶圆上形成焊料凸块的直接注塑成型焊接工艺
- Patent Title: Direct injection molded solder process for forming solder bumps on wafers
- Patent Title (中): 用于在晶圆上形成焊料凸块的直接注塑成型焊接工艺
-
Application No.: US13612812Application Date: 2012-09-12
-
Publication No.: US09273408B2Publication Date: 2016-03-01
- Inventor: Bing Dang , Michael A. Gaynes , Paul A. Lauro , Jae-Woong Nah
- Applicant: Bing Dang , Michael A. Gaynes , Paul A. Lauro , Jae-Woong Nah
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts, Mlotkowski, Safran & Cole P.C.
- Agent Catherine Ivers; Andrew M. Calderon
- Main IPC: B23K1/20
- IPC: B23K1/20 ; C25D5/02 ; H01L21/02 ; H01L23/00 ; C25D7/12 ; H05K3/34

Abstract:
Solder bumps are provided on round wafers through the use of injection molded solder. Copper pillars or ball limiting metallurgy are formed over I/O pads within the channels of a patterned mask layer. Solder is injected over the pillars or BLM, filling the channels. Molten solder can be injected in cavities formed in round wafers without leakage using a carrier assembly that accommodates wafers that have been previously subjected to mask layer deposition and patterning. One such carrier assembly includes an elastomeric body portion having a round recess, the walls of the recess forming a tight seal with the round wafer. Other carrier assemblies employ adhesives applied around the peripheral edges of the wafers to ensure sealing between the carrier assemblies and wafers.
Public/Granted literature
- US20140069817A1 DIRECT INJECTION MOLDED SOLDER PROCESS FOR FORMING SOLDER BUMPS ON WAFERS Public/Granted day:2014-03-13
Information query
IPC分类: