A xyθ precision alignment platform is provided. The alignment platform includes three power units and three moving platform. Two of the power units can drive a third moving platform moving in X or Y direction. The other power unit has a worm which can drive an arcuate teeth arrangement disposed between the second moving platform and the third moving platform to drive the third moving platform rotating. Whereby, since the worm is arranged to drive the arcuate teeth arrangement laterally, the alignment platform is thin and the rotative movement of the third moving platform can be precisely controlled. Additionally, each power unit may be electrically connected to a controller for respectively driving and controlling each power unit. When only the rotation of the third moving platform is required, only one of the power units needs to be driven, thus simplifying the operation of the alignment platform and improving the work efficiency.