Invention Grant
- Patent Title: Physical quantity sensor and electronic device
- Patent Title (中): 物理量传感器和电子设备
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Application No.: US13398010Application Date: 2012-02-16
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Publication No.: US09273962B2Publication Date: 2016-03-01
- Inventor: Kei Kanemoto
- Applicant: Kei Kanemoto
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-033665 20110218
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5719 ; G01C19/5747 ; G01C19/5733

Abstract:
A physical quantity sensor includes: a substrate; first and second displacement members in a spatial plane on the substrate and having rotation shafts; fixed electrodes on the substrate opposed to the first and second displacement members; a support member supporting the rotation shafts; fixing members supporting the support member via a spring unit; and a driving unit oscillating the support member in an oscillation direction. Each of the first and second displacement members shifts perpendicularly to the spatial plane around an axis of the corresponding rotation shaft. Each rotation shaft is shifted in an opposite direction from the center of gravity of the corresponding displacement member.
Public/Granted literature
- US20120210789A1 PHYSICAL QUANTITY SENSOR AND ELECTRONIC DEVICE Public/Granted day:2012-08-23
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