Invention Grant
- Patent Title: Pressure sensor chip
- Patent Title (中): 压力传感器芯片
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Application No.: US14085253Application Date: 2013-11-20
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Publication No.: US09274016B2Publication Date: 2016-03-01
- Inventor: Tomohisa Tokuda , Yuuki Seto
- Applicant: Azbil Corporation
- Applicant Address: JP Tokyo
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Troutman Sanders LLP
- Priority: JP2012-254726 20121120
- Main IPC: G01L13/02
- IPC: G01L13/02 ; G01L1/22 ; G01L9/00

Abstract:
A pressure sensor chip includes a sensor diaphragm, and first and second retaining members. The first and second retaining members face and are bonded to peripheral edge portions of a first face and another face of the sensor diaphragm, and have pressure guiding holes that guide measurement pressures to the sensor diaphragm. The first retaining member has, in an interior thereof, a non-bonded region that is continuous with a peripheral portion of the pressure guiding hole. The non-bonded region in the interior of the first retaining member is provided at a portion of a plane that is parallel to a pressure bearing surface of the sensor diaphragm. The second retaining member is provided with a recessed portion that prevents excessive dislocation of the sensor diaphragm when an excessively large pressure is applied to the sensor diaphragm.
Public/Granted literature
- US20140157905A1 PRESSURE SENSOR CHIP Public/Granted day:2014-06-12
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