Invention Grant
US09274137B2 Anti-stiction method in an inertial MEMS, corresponding computer program product, storage means and device
有权
惯性MEMS中的抗静电法,相应的计算机程序产品,存储装置和设备
- Patent Title: Anti-stiction method in an inertial MEMS, corresponding computer program product, storage means and device
- Patent Title (中): 惯性MEMS中的抗静电法,相应的计算机程序产品,存储装置和设备
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Application No.: US13878105Application Date: 2011-10-06
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Publication No.: US09274137B2Publication Date: 2016-03-01
- Inventor: Maurice Moreau
- Applicant: Maurice Moreau
- Applicant Address: FR Carquefou
- Assignee: Sercel
- Current Assignee: Sercel
- Current Assignee Address: FR Carquefou
- Agency: Westman Champlin & Koehler, P.A.
- Agent David D. Brush
- Priority: EP10186715 20101006
- International Application: PCT/EP2011/067498 WO 20111006
- International Announcement: WO2012/045835 WO 20120412
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P21/00 ; B81C1/00 ; B81B3/00

Abstract:
An anti-stiction method is proposed in an inertial micro-electro-mechanical device. The device includes: a mobile mass, suspended to an armature via a spring, and having at least one mobile electrode; and at least one fixed electrode rigidly attached to the armature, each fixed electrode cooperating with one of the at least one mobile electrode to form a pair of electrodes. The anti-stiction method carries out a step of detecting, for at least one stuck pair of electrodes, a stiction associated to a stiction force and a step of applying, during a predetermined time period, a predetermined voltage between the electrodes of at least one of the pair or pairs of electrodes, so as to create an electrostatic force which generates a displacement of the mobile mass according to the direction of the stiction force.
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