Invention Grant
- Patent Title: Method of stabilizing fluorine-containing acid amplifier
- Patent Title (中): 含氟酸放大器的稳定化方法
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Application No.: US14012188Application Date: 2013-08-28
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Publication No.: US09274420B2Publication Date: 2016-03-01
- Inventor: Shinya Akiba , Ryo Nadano , Robert L. Brainard
- Applicant: Central Glass Company, Limited
- Applicant Address: JP Ube-shi US NY Albany
- Assignee: Central Glass Company, Limited,The Research Foundation for the University of New York
- Current Assignee: Central Glass Company, Limited,The Research Foundation for the University of New York
- Current Assignee Address: JP Ube-shi US NY Albany
- Agency: Crowell & Moring LLP
- Priority: JP2012-190942 20120831; JP2012-238603 20121030
- Main IPC: G03F7/004
- IPC: G03F7/004
Abstract:
A method of stabilizing a fluorine-containing acid amplifier. The method is provided to include the step of dissolving a fluorine-containing acid amplifier in an organic solvent thereby producing a solution of the fluorine-containing acid amplifier, the fluorine-containing acid amplifier being represented by general formula (1):
Public/Granted literature
- US20140065541A1 Method of Stabilizing Fluorine-Containing Acid Amplifier Public/Granted day:2014-03-06
Information query
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