Invention Grant
- Patent Title: Gradient assisted image resampling in micro-lithographic printing
- Patent Title (中): 微型平版印刷中的梯度辅助图像重采样
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Application No.: US14536467Application Date: 2014-11-07
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Publication No.: US09275442B2Publication Date: 2016-03-01
- Inventor: Lars Ivansen , Anders Osterberg
- Applicant: Mycronic AB
- Applicant Address: SE Taby
- Assignee: Mycronic AB
- Current Assignee: Mycronic AB
- Current Assignee Address: SE Taby
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: G06K9/40
- IPC: G06K9/40 ; G06T5/00 ; G03F7/20

Abstract:
The present disclosure relates to the re-sampling of pixel data, with one application being micro-lithography. In particular, it relates to a first pixel map, including a plurality of white, black and grey scale pixels and gradient directions for one or more of the grey scale pixels, that is resampled to produce a second pixel map using edge geometry data generated from the gradient directions and grey scale values.
Public/Granted literature
- US20150125077A1 GRADIENT ASSISTED IMAGE RESAMPLING IN MICRO-LITHOGRAPHIC PRINTING Public/Granted day:2015-05-07
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