Invention Grant
- Patent Title: Apparatus and method for manufacturing a light-emitting device using a neutral particle beam
- Patent Title (中): 用于制造使用中性粒子束的发光装置的装置和方法
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Application No.: US14006937Application Date: 2011-05-30
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Publication No.: US09275859B2Publication Date: 2016-03-01
- Inventor: Suk Jae Yoo , Seong Bong Kim
- Applicant: Suk Jae Yoo , Seong Bong Kim
- Applicant Address: KR Daejeon
- Assignee: KOREA BASIC SCIENCE INSTITUTE
- Current Assignee: KOREA BASIC SCIENCE INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2011-0026029 20110323
- International Application: PCT/KR2011/003943 WO 20110530
- International Announcement: WO2012/128420 WO 20120927
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; H01L33/00 ; C30B25/02 ; C30B25/10 ; C30B29/40

Abstract:
The present invention relates to an apparatus and method for manufacturing a semiconductor light-emitting device using a neutral particle beam. According to the present invention, since the kinetic energy of the neutral particle beam is provided as a portion of the reaction energy for causing a nitride semiconductor single crystal thin film to be formed on a substrate, and the reaction energy is not provided as heat energy by heating a substrate as in the prior art, the substrate may be treated at a relatively low temperature. Furthermore, elements such as Si, Mg, and the like, which are solid elements required for doping are sprayed onto the substrate from a source which generates solid elements for doping together with the neutral particle beam to achieve high doping efficiency at a lower temperature. According to the present invention, since the substrate is treated at a low temperature, the degradation of the substrate and thin film may be prevented, and the undesired diffusion of the doping elements may be prevented to enable the manufacture of the semiconductor light-emitting device having superior light-emitting properties in a relatively easy manner.
Public/Granted literature
- US20140017827A1 APPARATUS AND METHOD FOR MANUFACTURING A LIGHT-EMITTING DEVICE USING A NEUTRAL PARTICLE BEAM Public/Granted day:2014-01-16
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