Invention Grant
- Patent Title: Liquid replenishing device
- Patent Title (中): 液体补充装置
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Application No.: US14127970Application Date: 2013-03-27
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Publication No.: US09275880B2Publication Date: 2016-03-01
- Inventor: Guochao Chu , Jinqun He , Yingying Wang , Likun Pei
- Applicant: Beijing Sevenstar Electronics Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BEIJING SEVENSTAR ELECTRONICS CO., LTD.
- Current Assignee: BEIJING SEVENSTAR ELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing
- Priority: CN201210387839 20121012
- International Application: PCT/CN2013/073236 WO 20130327
- International Announcement: WO2014/056305 WO 20140417
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; B08B3/14
Abstract:
The present invention provides a liquid replenishing device comprising a liquid storage tank, a chemical liquid supply pipeline, an ultrapure water supply pipeline, an ultrapure water quantitative supplement pipeline and a circulating pipeline. The chemical liquid supply pipeline supplies chemical liquids to the liquid storage tank. The ultrapure water supply pipeline supplies ultrapure water to the liquid storage tank. The ultrapure water quantitative supplement pipeline quantitatively replenishes ultrapure water to the liquid storage tank. One end of the circulating pipeline is connected with the outlet of the liquid storage tank, the other end of the circulating pipeline is connected with the inlet of the liquid storage tank.
Public/Granted literature
- US20140305515A1 LIQUID REPLENISHING DEVICE Public/Granted day:2014-10-16
Information query
IPC分类:
