Invention Grant
- Patent Title: Floating body memory cell having gates favoring different conductivity type regions
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Application No.: US14641167Application Date: 2015-03-06
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Publication No.: US09275999B2Publication Date: 2016-03-01
- Inventor: Peter L. D. Chang , Uygar E. Avci , David Kencke , Ibrahim Ban
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/088 ; H01L27/108 ; H01L27/12 ; H01L29/78 ; H01L29/66 ; H01L21/28
Abstract:
A method for fabricating floating body memory cells (FBCs), and the resultant FBCs where gates favoring different conductivity type regions are used is described. In one embodiment, a p type back gate with a thicker insulation is used with a thinner insulated n type front gate. Processing, which compensates for misalignment, which allows the different oxide and gate materials to be fabricated is described.
Public/Granted literature
- US20150179650A1 FLOATING BODY MEMORY CELL HAVING GATES FAVORING DIFFERENT CONDUCTIVITY TYPE REGIONS Public/Granted day:2015-06-25
Information query
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