Invention Grant
US09276075B2 Semiconductor device having vertical MOSFET structure that utilizes a trench-type gate electrode and method of producing the same
有权
具有利用沟槽型栅电极的垂直MOSFET结构的半导体器件及其制造方法
- Patent Title: Semiconductor device having vertical MOSFET structure that utilizes a trench-type gate electrode and method of producing the same
- Patent Title (中): 具有利用沟槽型栅电极的垂直MOSFET结构的半导体器件及其制造方法
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Application No.: US14352142Application Date: 2012-10-17
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Publication No.: US09276075B2Publication Date: 2016-03-01
- Inventor: Hidefumi Takaya , Hideo Matsuki , Naohiro Suzuki , Tsuyoshi Ishikawa , Narumasa Soejima , Yukihiko Watanabe
- Applicant: Hidefumi Takaya , Hideo Matsuki , Naohiro Suzuki , Tsuyoshi Ishikawa , Narumasa Soejima , Yukihiko Watanabe
- Applicant Address: JP Toyota JP Kariya
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- Current Assignee Address: JP Toyota JP Kariya
- Agency: Oliff PLC
- Priority: JP2011-229183 20111018
- International Application: PCT/IB2012/002081 WO 20121017
- International Announcement: WO2013/057564 WO 20130425
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8234 ; H01L29/423 ; H01L29/417 ; H01L29/66 ; H01L29/06 ; H01L21/28 ; H01L21/04 ; H01L29/16

Abstract:
A semiconductor device has a semiconductor substrate including a body region, a drift region, a trench that extends from a surface of the semiconductor substrate into the drift region through the body region, and a source region located adjacent to the trench in a range exposed to the surface of the semiconductor substrate, the source region being isolated from the drift region by the body region. A specific layer is disposed on a bottom of the trench, and it has a characteristic of forming a depletion layer at a junction between the specific layer and the drift region. An insulating layer covers an upper surface of the specific layer and a sidewall of the trench. A conductive portion is formed on a part of the side wall of the trench. The conductive portion is joined to the specific layer, and reaches the surface of the semiconductor substrate.
Public/Granted literature
- US20140252465A1 SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME Public/Granted day:2014-09-11
Information query
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