Invention Grant
- Patent Title: Method for making high voltage integrated circuit devices in a fin-type process and resulting devices
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Application No.: US14515070Application Date: 2014-10-15
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Publication No.: US09276088B1Publication Date: 2016-03-01
- Inventor: Jagar Singh
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/8242
- IPC: H01L21/8242 ; H01L29/66 ; H01L27/088 ; H01L21/762

Abstract:
Methods for making high voltage IC devices utilizing a fin-type process and resulting devices are disclosed. Embodiments include forming two pluralities of silicon fins on a substrate layer, separated by a space, wherein adjacent silicon fins are separated by a trench; forming an oxide layer on the substrate layer and filling a portion of each trench; forming two deep isolation trenches into the oxide layer and the substrate layer adjacent to the two pluralities of silicon fins; forming a graded voltage junction by implanting a dopant into the substrate layer below the two pluralities of silicon fins; forming a gate structure on the oxide layer and between the two pluralities of silicon fins; implanting a dopant into and under the two pluralities of silicon fins, forming source and drain regions; and forming an epitaxial layer onto the two pluralities of silicon fins to form merged source and drain fins.
Information query
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