Invention Grant
- Patent Title: Phase change memory cell with heat shield
- Patent Title (中): 相变存储单元带隔热罩
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Application No.: US14620467Application Date: 2015-02-12
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Publication No.: US09276208B2Publication Date: 2016-03-01
- Inventor: Matthew J. BrightSky , Chung H. Lam , Alejandro G. Schrott
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Vazken Alexanian
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L45/00 ; H01L27/24

Abstract:
A method for fabricating the phase change memory cells. The method includes forming an electrically conductive bottom electrode within a substrate. A heat shield is formed within the substrate and above the bottom electrode. The heat shield is thermally coupled to the bottom electrode, includes a sidewall and extends away from the bottom electrode. A heating element is formed within the sidewall of the heat shield. The heating element is electrically coupled to the bottom electrode and is configured to generate heat during programming of the phase change memory cell.
Public/Granted literature
- US20150179932A1 PHASE CHANGE MEMORY CELL WITH HEAT SHIELD Public/Granted day:2015-06-25
Information query
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