Invention Grant
- Patent Title: Carrier device and ceramic member
- Patent Title (中): 载体装置和陶瓷构件
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Application No.: US14383301Application Date: 2013-02-28
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Publication No.: US09276504B2Publication Date: 2016-03-01
- Inventor: Kaname Miwa , Tomonori Niwa , Jun Kurano
- Applicant: NGK SPARK PLUG CO., LTD.
- Applicant Address: JP Aichi
- Assignee: NGK SPARK PLUG CO., LTD.
- Current Assignee: NGK SPARK PLUG CO., LTD.
- Current Assignee Address: JP Aichi
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-050209 20120307
- International Application: PCT/JP2013/001244 WO 20130228
- International Announcement: WO2013/132803 WO 20130912
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H02N13/00 ; B25J11/00 ; H01L21/67 ; H01L21/677 ; B25J15/00 ; B25J15/06

Abstract:
A ceramic member, in a carrier device, includes: a plurality of ceramic layers that have insulating properties and are integrally sintered; a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force; a power feed port configured to receive a supply of electric power to the clamping electrode from outside of the ceramic member; a land formed on a second ceramic layer, which is different from the first ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port; and a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the clamping electrode with the land.
Public/Granted literature
- US20150021944A1 CARRIER DEVICE AND CERAMIC MEMBER Public/Granted day:2015-01-22
Information query
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