Invention Grant
US09277595B2 Heating lamp having base to facilitate reduced air flow about the heating lamp
有权
具有基座的加热灯，以便于围绕加热灯减少空气流动
- Patent Title: Heating lamp having base to facilitate reduced air flow about the heating lamp
- Patent Title (中): 具有基座的加热灯，以便于围绕加热灯减少空气流动
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Application No.: US13770013Application Date: 2013-02-19
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Publication No.: US09277595B2Publication Date: 2016-03-01
- Inventor: Nyi Oo Myo
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F26B3/30
- IPC: F26B3/30 ; F26B19/00 ; H05B3/00
Abstract:
Embodiments of heating lamps and heating lamp arrays are disclosed herein. In some embodiments, a heating lamp may include a heating lamp envelope having a filament disposed within the heating lamp envelope; a base coupled to the heating lamp envelope to support the heating lamp envelope; and one or more recesses formed in the base to provide an improved grip for a user. In some embodiments, a heating lamp array for use in a semiconductor process chamber may include a plurality of heating lamps, each heating lamp comprising a heating lamp envelope having a filament disposed within the envelope and a base coupled to the heating lamp envelope to support the envelope, the base having one or more recesses formed in the base to provide an improved grip for a user, wherein a distance between adjacent heating lamp bases is about 0.02 inches to about 0.08 inches.
Public/Granted literature
- US20130223824A1 HEATING LAMP HAVING BASE TO FACILITATE REDUCED AIR FLOW ABOUT THE HEATING LAMP Public/Granted day:2013-08-29
Information query
IPC分类:
