Invention Grant
US09277596B2 Temperature control pin, and the device and method for supporting substrate in UV curing process 有权
温度控制引脚,以及用于在紫外线固化过程中支撑基板的装置和方法

Temperature control pin, and the device and method for supporting substrate in UV curing process
Abstract:
A temperature control pin, and the device and the method for supporting a substrate in the ultraviolet (UV) solidifying alignment process are disclosed. The temperature control pins includes a supporting pin for supporting a substrate, a heater being arranged within the supporting pin and is close to a top of the supporting pin, and a cooling system. The heater is controlled by the temperature control system to heat up the supporting pin. The cooling system is controlled by the temperature control system to cool down the supporting pin, and cooperatively operates with the heater to dynamically adjust the temperature of the supporting pins. When being heated, the temperature of the temperature control pins is adjusted by the temperature control system, and the substrate is heated uniformly such that the “Pin Mura” phenomenon is reduced or decreased.
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