Invention Grant
US09277596B2 Temperature control pin, and the device and method for supporting substrate in UV curing process
有权
温度控制引脚,以及用于在紫外线固化过程中支撑基板的装置和方法
- Patent Title: Temperature control pin, and the device and method for supporting substrate in UV curing process
- Patent Title (中): 温度控制引脚,以及用于在紫外线固化过程中支撑基板的装置和方法
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Application No.: US13978719Application Date: 2013-06-24
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Publication No.: US09277596B2Publication Date: 2016-03-01
- Inventor: Tao Song , Guodong Zhao , Ming Liu , Tao Ma
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201310246709 20130620
- International Application: PCT/CN2013/077767 WO 20130624
- International Announcement: WO2014/201704 WO 20141224
- Main IPC: F26B3/30
- IPC: F26B3/30 ; A47J39/00 ; F25B29/00 ; H05B3/00 ; H05B1/02 ; H05B3/02 ; H01L21/67 ; H01L21/687 ; G02F1/13 ; G02F1/1337

Abstract:
A temperature control pin, and the device and the method for supporting a substrate in the ultraviolet (UV) solidifying alignment process are disclosed. The temperature control pins includes a supporting pin for supporting a substrate, a heater being arranged within the supporting pin and is close to a top of the supporting pin, and a cooling system. The heater is controlled by the temperature control system to heat up the supporting pin. The cooling system is controlled by the temperature control system to cool down the supporting pin, and cooperatively operates with the heater to dynamically adjust the temperature of the supporting pins. When being heated, the temperature of the temperature control pins is adjusted by the temperature control system, and the substrate is heated uniformly such that the “Pin Mura” phenomenon is reduced or decreased.
Public/Granted literature
- US20150037018A1 Temperature Control Pin, and The Device and Method For Supporting Substrate In UV Curing Process Public/Granted day:2015-02-05
Information query
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