Invention Grant
US09277635B2 Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light 有权
用于产生极紫外光的方法和用于产生极紫外光的装置

Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light
Abstract:
An extreme ultraviolet light generation device may comprise: a chamber provided with a through-hole; an introduction optical system configured to introduce the pulse laser beam into a first predetermined region inside the chamber through the through-hole; a target supply device configured to output the target toward the first predetermined region; a light source configured to irradiate a second predetermined region with light whose optical path in the second predetermined region has a transverse section that is longer along a direction perpendicular to a direction of movement of the target than along the direction of movement of the target, the second predetermined region including part of a trajectory of the target between the target supply device and the first predetermined region; and an optical sensor configured to detect light incident on the optical sensor from the second predetermined region to detect the target passing through the second predetermined region.
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