Invention Grant
- Patent Title: Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light
- Patent Title (中): 用于产生极紫外光的方法和用于产生极紫外光的装置
-
Application No.: US14643782Application Date: 2015-03-10
-
Publication No.: US09277635B2Publication Date: 2016-03-01
- Inventor: Masato Moriya , Hideyuki Hayashi , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2012-199360 20120911
- Main IPC: H01G2/00
- IPC: H01G2/00 ; H05G2/00 ; H01J37/22 ; H01J37/304

Abstract:
An extreme ultraviolet light generation device may comprise: a chamber provided with a through-hole; an introduction optical system configured to introduce the pulse laser beam into a first predetermined region inside the chamber through the through-hole; a target supply device configured to output the target toward the first predetermined region; a light source configured to irradiate a second predetermined region with light whose optical path in the second predetermined region has a transverse section that is longer along a direction perpendicular to a direction of movement of the target than along the direction of movement of the target, the second predetermined region including part of a trajectory of the target between the target supply device and the first predetermined region; and an optical sensor configured to detect light incident on the optical sensor from the second predetermined region to detect the target passing through the second predetermined region.
Public/Granted literature
- US20150189730A1 METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND DEVICE FOR GENERATING EXTREME ULTRAVIOLET LIGHT Public/Granted day:2015-07-02
Information query