Invention Grant
- Patent Title: Aberration correcting method and aberration correcting apparatus
- Patent Title (中): 畸变校正方法和像差校正装置
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Application No.: US14133364Application Date: 2013-12-18
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Publication No.: US09277858B2Publication Date: 2016-03-08
- Inventor: Koji Nozato , Kohei Takeno
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2012-279478 20121221
- Main IPC: A61B3/14
- IPC: A61B3/14 ; A61B3/10 ; A61B3/12

Abstract:
Aberration is measured as phase information at each of a plurality of aberration measurement points, and at the time of correcting the aberration with correction pixels of an aberration correction unit of which the number is greater than the number of the plurality of aberration measurement points, correction pixels corresponding to each aberration measurement point are driven based on the phase information. Regarding correction pixels not positionally corresponding to the aberration measurement points, the aberration correction unit is driven based on phase information in the vicinity of this correction pixel.
Public/Granted literature
- US20140176907A1 ABERRATION CORRECTING METHOD AND ABERRATION CORRECTING APPARATUS Public/Granted day:2014-06-26
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