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US09277858B2 Aberration correcting method and aberration correcting apparatus 有权
畸变校正方法和像差校正装置

Aberration correcting method and aberration correcting apparatus
Abstract:
Aberration is measured as phase information at each of a plurality of aberration measurement points, and at the time of correcting the aberration with correction pixels of an aberration correction unit of which the number is greater than the number of the plurality of aberration measurement points, correction pixels corresponding to each aberration measurement point are driven based on the phase information. Regarding correction pixels not positionally corresponding to the aberration measurement points, the aberration correction unit is driven based on phase information in the vicinity of this correction pixel.
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