Invention Grant
US09277869B2 Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus
有权
薄膜压电元件，薄膜压电致动器，薄膜压电传感器，硬盘驱动器和喷墨打印机装置
- Patent Title: Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus
- Patent Title (中): 薄膜压电元件，薄膜压电致动器，薄膜压电传感器，硬盘驱动器和喷墨打印机装置
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Application No.: US14047649Application Date: 2013-10-07
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Publication No.: US09277869B2Publication Date: 2016-03-08
- Inventor: Katsuyuki Kurachi , Yasuhiro Aida , Hitoshi Sakuma , Kazuhiko Maejima
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: H01L41/187
- IPC: H01L41/187 ; A61B5/024 ; B41J2/14 ; G01C19/5621 ; G01L9/00 ; G11B5/55 ; H01L41/08 ; H01L41/316
Abstract:
There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K1-w-xNawSrx)m(Nb1-yZry)O3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.
Public/Granted literature
Information query
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