Invention Grant
US09278366B2 Method for supplying a cleaning medium and method and cleaning device for cleaning a workpiece 有权
用于提供清洁介质的方法以及用于清洁工件的方法和清洁装置

Method for supplying a cleaning medium and method and cleaning device for cleaning a workpiece
Abstract:
In order to improve the efficiency of a method for supplying a cleaning medium, it is suggested that a cleaning gas, in particular, air be introduced into a reservoir (6) and that a cleaning liquid (38) subject to pressure be introduced into the reservoir for acting on the cleaning gas with pressure, said cleaning gas being subject to an initial pressure. Furthermore, a method for cleaning a workpiece and a cleaning device are suggested.
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