Invention Grant
- Patent Title: MEMS multi-axis gyroscope Z-axis electrode structure
- Patent Title (中): MEMS多轴陀螺仪Z轴电极结构
-
Application No.: US13755953Application Date: 2013-01-31
-
Publication No.: US09278845B2Publication Date: 2016-03-08
- Inventor: Cenk Acar
- Applicant: Fairchild Semiconductor Corporation
- Applicant Address: US CA San Jose
- Assignee: FAIRCHILD SEMICONDUCTOR CORPORATION
- Current Assignee: FAIRCHILD SEMICONDUCTOR CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: G01C19/56
- IPC: G01C19/56 ; B81B3/00 ; G01C19/5712 ; B81C1/00

Abstract:
Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
Public/Granted literature
- US20130139592A1 MEMS MULTI-AXIS GYROSCOPE Z-AXIS ELECTRODE STRUCTURE Public/Granted day:2013-06-06
Information query