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US09278845B2 MEMS multi-axis gyroscope Z-axis electrode structure 有权
MEMS多轴陀螺仪Z轴电极结构

MEMS multi-axis gyroscope Z-axis electrode structure
Abstract:
Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.
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