Invention Grant
- Patent Title: Vertical electromechanical switch device
- Patent Title (中): 立式机电开关装置
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Application No.: US14133410Application Date: 2013-12-18
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Publication No.: US09278848B2Publication Date: 2016-03-08
- Inventor: Ann Witvrouw , Maliheh Ramezani , Stefan Cosemans
- Applicant: IMEC , Katholieke Universiteit Leuven
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC,Katholieke Universiteit Leuven
- Current Assignee: IMEC,Katholieke Universiteit Leuven
- Current Assignee Address: BE Leuven BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP12198127 20121219
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; H01H1/00 ; H01H59/00 ; B81C1/00

Abstract:
The disclosed technology relates generally to electromechanical devices, and relates more specifically to a nanoelectromechanical switch device and a method for manufacturing the same. In one aspect, an electromechanical device includes a first electrode stack and a second electrode stack, both electrode stacks extending in a vertical direction relative to a substrate surface and being spaced apart by a gap. The electromechanical device additionally includes a third electrode stack comprising a beam extending in a vertical direction in the electrode gap and being spaced apart from the first electrode stack by a first gap, from the second electrode stack by a second gap, and from the substrate by a third gap; and a connector portion overlapping the first and second electrode stacks, wherein, in operation, the beam is movable in a first direction so as to electrically connect with the first electrode stack or in a second direction so as to electrically connect with the second electrode stack, and, in a rest position, the beam is isolated from the first and the second electrode stacks. Additionally, at least one of the first or second electrode stacks comprises two electrodes including a top electrode stacked over a bottom electrode, wherein the top and bottom electrodes are separated by an electrical insulator.
Public/Granted literature
- US20140225167A1 VERTICAL ELECTROMECHANICAL SWITCH DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-08-14
Information query
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