Invention Grant
- Patent Title: Method and apparatus for recycling waste sulfuric acid
- Patent Title (中): 回收废硫酸的方法和设备
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Application No.: US14338056Application Date: 2014-07-22
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Publication No.: US09278860B2Publication Date: 2016-03-08
- Inventor: Jin-Feng Shiu , Rouh-Jier Wang , Ching-Jung Hsu , Wan-Yu Chen , Han-Ru Hung
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: C01B17/69
- IPC: C01B17/69 ; C01B17/90 ; B01J14/00 ; B01J19/00 ; B01J19/24

Abstract:
A method and an apparatus for recycling waste sulfuric acid solution are provided. The method includes providing a reaction tank and introducing a waste sulfuric acid (H2SO4) solution into the reaction tank, and the waste sulfuric acid solution includes hydrogen peroxide (H2O2). The method also includes supplying a compound containing chlorine into the reaction tank. The method further includes mixing the compound containing chlorine with the waste sulfuric acid solution to promote a chemical reaction that decomposes the hydrogen peroxide (H2O2).
Public/Granted literature
- US20160023901A1 METHOD AND APPARATUS FOR RECYCLING WASTE SULFURIC ACID Public/Granted day:2016-01-28
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