Invention Grant
US09279027B1 Photoacid generator compound, polymer comprising end groups containing the photoacid generator compound, and method of making 有权
光酸发生剂化合物,包含含有光酸产生剂化合物的端基的聚合物,以及制造方法

Photoacid generator compound, polymer comprising end groups containing the photoacid generator compound, and method of making
Abstract:
A compound has formula (I): wherein in formula (I), Z is a y valent C1-20 organic group, A1 and A2 are each independently ester containing or non-ester containing and are fluorinated or non-fluorinated, and are independently C1-40 alkylene, C3-40 cycloalkylene, C6-40 arylene, or C7-40 aralkylene, and A1 contains a nitrile, ester, or aryl substituent group alpha to the point of attachment with sulfur, L is a heteroatom or a single bond, X1 is a single bond, —O—, —S—, —C(═O)—O—, —O—C(═O)—, —O—C(═O)—O—, —C(═O)—NR—, —NR—C(═O)—, —NR—C(═O)—NR—, —S(═O)2—O—, —O—S(═O)2—O—, —NR—S(═O)2—, or —S(═O)2—NR, wherein R is H, C1-10 alkyl, C3-10 cycloalkyl or C6-10 aryl, Q− is an anionic group, G+ is a metallic or non-metallic cation, and y is an integer from 1 to 6. A polymer having end groups comprising the reaction product of the compound of formula (I), and a method of making a polymer, are also disclosed.
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