Invention Grant
- Patent Title: Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
- Patent Title (中): 薄膜沉积装置,使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置
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Application No.: US13157220Application Date: 2011-06-09
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Publication No.: US09279177B2Publication Date: 2016-03-08
- Inventor: Yong-Sup Choi , Myeng-Woo Nam
- Applicant: Yong-Sup Choi , Myeng-Woo Nam
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2010-0065465 20100707
- Main IPC: H01L33/00
- IPC: H01L33/00 ; B05C11/10 ; C23C14/04 ; C23C14/24 ; C23C14/50 ; C23C14/54 ; C23C14/56

Abstract:
A thin film deposition apparatus includes: a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and having a plurality of patterning slits arranged in the first direction; a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, the plurality of barrier plates partitioning a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces; and a capacitive vacuum gauge disposed at a side of the deposition source and configured to measure a pressure inside the deposition source.
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