Invention Grant
- Patent Title: Manufacturing design and processing methods and apparatus for sputtering targets
- Patent Title (中): 溅射靶的制造设计及加工方法及装置
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Application No.: US12109816Application Date: 2008-04-25
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Publication No.: US09279178B2Publication Date: 2016-03-08
- Inventor: Janine K. Kardokus , Michael Pinter , Michael D. Payton , Steven (Chi Tse) Wu , Jared Akins , Werner Hort
- Applicant: Janine K. Kardokus , Michael Pinter , Michael D. Payton , Steven (Chi Tse) Wu , Jared Akins , Werner Hort
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Faegre Baker Daniels LLP
- Main IPC: C22F1/00
- IPC: C22F1/00 ; C23C14/34 ; C22F1/18

Abstract:
Sputtering targets having a reduced burn-in time are disclosed that comprise: a) a heat-modified surface material having a substantially uniform crystallographic orientation, wherein at least part of the surface material was melted during heat-treatment, and b) a core material having an average grain size. Sputtering targets are also disclosed that include a heat-modified surface material having network of shallow trenches, alternating rounded peaks and valleys in the surface of the target or a combination thereof, wherein at least part of the surface material was melted during heat-treatment, and a core material having an average grain size. Methods of producing sputtering targets having reduced burn-in times comprises: a) providing a sputtering target comprising a sputtering surface having a sputter material and a crystal lattice, and b) heat-modifying the sputtering surface in order to melt at least part of the surface material and modify the crystal lattice. Methods of producing a sputtering target having a reduced burn-in time are also disclosed comprising: providing a sputtering target having a sputtering surface, wherein the sputtering surface comprises a damage layer, and modifying the sputtering surface by deplating a layer of material, pulsed-plating a layer of material or a combination thereof.
Public/Granted literature
- US20080289958A1 Novel Manufacturing Design and Processing Methods and Apparatus for Sputtering Targets Public/Granted day:2008-11-27
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