Invention Grant
- Patent Title: Feed-through apparatus for a chemical vapour deposition device
- Patent Title (中): 用于化学气相沉积装置的直通装置
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Application No.: US13523124Application Date: 2012-06-14
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Publication No.: US09279185B2Publication Date: 2016-03-08
- Inventor: Zilan Li , Teng Hock Kuah , Chidambaram Palaniappan , Ravindra Raghavendra
- Applicant: Zilan Li , Teng Hock Kuah , Chidambaram Palaniappan , Ravindra Raghavendra
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: C23C16/455
- IPC: C23C16/455

Abstract:
A feed-through apparatus for a chemical vapor deposition device including: a feed-through main body; a plurality of runner units; and a feed-through device rotatable with respect to the plurality of runner units within the feed-through main body. Each runner unit has a fluid inlet and an elongated runner for receiving the fluid from the fluid inlet wherein the elongated runner extends spirally on a surface of the runner unit. The feed-through device has a plurality of feed-through device orifices for receiving fluids from corresponding elongated runners during rotation of the feed-through device and has outlet-orifices for releasing the fluids into a reactor chamber.
Public/Granted literature
- US20130333620A1 FEED-THROUGH APPARATUS FOR A CHEMICAL VAPOUR DEPOSITION DEVICE Public/Granted day:2013-12-19
Information query
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